Use Case
Dry Pump Monitoring Solution Takes the Risk out of Semiconductor Manufacturing

Ensuring all process equipment is in tip-top shape is critical to semiconductor manufacturing in pursuing wafer production quality and yield. For example, if the dry pump of the low pressure chemical vapor deposition (LPCVD) system or ion implanter used in the diffusion process provides insufficient vacuum or fails, causing back pressure to push air and foreign particles into the chamber, the entire run of wafers may need to be scrapped. To address these issues, Good Tech Instruments has partnered with ADLINK Technology in developing a dry pump monitoring solution to help semiconductor manufacturers eliminate the risk of unexpected shutdown and optimize equipment management.